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KMID : 0381920150450040214
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Korean Journal of Microscopy
2015 Volume.45 No. 4 p.214 ~ p.217
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Specimen Preparation for Scanning Electron Microscope Using a Converted Sample Stage
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Kim Hye-lan
Kim Hyo-Sik
Yu Seung-Min
Bae Tae-Sung
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Abstract
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This study introduces metal coating as an effective sample preparation method to remove charge-up caused by the shadow effect during fi eld emission scanning electron microscope (FE-SEM) analysis of dynamic structured samples. During a FE-SEM analysis, charge-up occurs when the primary electrons (input electrons) that scan the specimens are not equal to the output electrons (secondary electrons, backscattered electrons, auger electrons, etc.) generated from the specimens. To remove charge-up, a metal layer of Pt, Au or Pd is applied on the surface of the sample. However, in some cases, charge-up still occurs due to the shadow effect. This study developed a coating method that effectively removes chargeup. By creating a converted sample stage capable of simultaneous tilt and rotation, the shadow effect was successfully removed, and image data without charge-up were obtained.
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KEYWORD
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Shadow effect, Charge-up, Converted sample stage, Field emission scanning electron microscope
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