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KMID : 1039220160260040404
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Journal of Korean Society of Occupational and Environmental Hygiene
2016 Volume.26 No. 4 p.404 ~ p.410
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Reliability Analysis of Material Safety Data Sheets(MSDS) for Photoresist Chemicals used in some Semiconductor Factories
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Lee Kyung-Hwa
Lee Seok-Yong
Choi Yon-Ji
Choi Han-Young
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Abstract
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Objectives: This study aimed to examine and analyze the material safety data sheet(MSDS) information for photoresist chemicals used in certain processes in semiconductor plants.
Methods: After collecting MSDS for 178 chemical products currently used in certain processes in semiconductor plants, we analyzed Sections 2, 3, 11, and 15 of each MSDS with reference to the guidelines for evaluating the reliability of MSDS provided by the Korea Occupational Safety and Health Agency. In addition, we reviewed the recorded uses and the ratios of trade secrets.
Results and Conclusions: We studied a total of 178 chemical products. An MSDS was available for 176(98.9%) of them and all adhered to the Globally Harmonized System(GHS) regulations. There were 37 cases of errors in Hazard Identification, pertaining to 20.8% of all products surveyed. There were 64 cases of errors in the current legal circumstances, pertaining to 36.0% of all products. There were a total of 407 trade secrets across 52.2% of products. We believe that a government-led education and certification system needs to be introduced to improve the transfer of MSDS information. The government, chemical manufacturers and suppliers all need to make an effort to produce reliable MSDS.
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KEYWORD
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material safety data sheet, MSDS, semiconductor industry, trade secret
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