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KMID : 1039220220320020111
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Journal of Korean Society of Occupational and Environmental Hygiene
2022 Volume.32 No. 2 p.111 ~ p.115
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Possibility of Spreading Infectious Diseases by Droplets Generated from Semiconductor Fabrication Process
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Oh Kun-Hwan
Kim Ki-Youn
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Abstract
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Objectives: The purpose of this study is to verify whether droplet-induced propagation, the main route of infectious diseases such as COVID-19, can occur in semiconductor FAB (Fabrication), based on research results on general droplet propagation.
Methods: Through data surveys droplet propagation was modeled through simulation and experimental case analysis according to general (without mask) and mask-wearing conditions, and the risk of droplet propagation was inferred by reflecting semiconductor FAB operation conditions (air current, air conditioning system, humidity, filter conditions).
Results: Based on the results investigated to predict the possibility of spreading infectious diseases in semiconductor FAB, the total amount of droplet propagation (concentration), propagation distance, and virus life in FAB were inferred by reflecting the management parameter of semiconductor FAB.
Conclusions: The total amount(concentration) of droplet propagation in the semiconductor fab is most affected by the presence or absence of wearing a mask and the line air dilution rate has some influence. when worn it spreads within 0.35~1m, and since the humidity is constant the virus can survive in the air for up to 3 hours. as a result the semiconductor fab is judged to be and effective space to block virus propagation due to the special environmental condition of a clean room.
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KEYWORD
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Droplets, Infectious diseases, Mask, Semiconductor FAB
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